ATMI, Inc.

/ATMI, Inc.
/ATMI, Inc.

ATMI, Inc.

7 Commerce Drive

Danbury Connecticut 06810
Vereinigte Staaten von Amerika
Telefon +1 800 766 2681
Telefax +1 203 794 1100
info@atmi.com
https://www.atmi.com

Unternehmenstyp

Wafer Hersteller

Sprachen

Englisch
  • Bewertung

    Danke für die Bewertung.

  • 2.6/5 (10 Bewertungen)
  • Leistungen / Produkte

    Wafer Herstellers

    Informationen

    SDS® Gas Sources

    ATMI SDS Pressure Receptacle Competent Authority Approvals and Exemptions
    SDS2/SDS3 Arsine
    SDS2/SDS3 Boron Trifluoride-Enriched
    SDS2/SDS3 Phosphine
    SDS2 Germanium Tetrafluoride
    SDS2 Hydrogen Selenide
    SDS3
    SDS2 Phosphorus Trifluoride
    SDS2 Arsenic Pentafluoride
    SDS2 Silicon Tetrafluoride

    VAC® Gas Sources

    VAC® BF3 Isotopically Enriched
    VAC® BF3 Natural Abundance
    VAC® NF3
    VAC® CO
    VAC® Isotopically Enriched (GeF4)

    High-k Gate Dielectrics

    Hf13, HTB
    TAETO
    TDEAH, Hf15
    TDMAH
    TDMAS, Si35
    TEMAH
    TEMAS

    Metal Gate Electrodes

    Ru15
    PDMAT
    TBTDET
    TiCl4

    Dopants

    BPTEOS
    TEB
    TEPO
    TEASATE
    TEB11
    TMB
    TMP
    TMPO

    Specialty Sub-Atmospheric Gas Packages

    SAGE® Germane
    SAGE® Phosphine

    Gas Delivery System

    TX4™

    Advanced Liquid Chemical Delivery

    3Chem
    Bulkfill™ 1700
    ProEVap™ - solids delivery for ALD (currently in Beta testing at customers)
    Unichem™ 2900
    VMBT System
    Manually operated ampoules
    Automatic operated ampoules

    High-k Capacitors

    Hf13, HTB
    SiCl4
    TAETO
    TDEAH, Hf15
    TDMAH
    TDMAS, Si35
    TEMAH
    TEMAS
    FeRAM

    PB11
    PZTG
    Ti14, Ti(O-IPr)2(THD)2
    Zr15, Zr(O-IPr)2(THD)2
    ZtQGAdvanced Interconnect Level

    Low-k Dielectrics

    4MS
    OMCTS

    Post Etch CleansPost-Etch Residue RemovalST-250™ & ST-255™NOE and Contact CleansNOET
    Contact Cleans™ - Contact Cleans I, II, IIIPhoto Resist and Organic CleansST-22™
    ST-23™
    ST-26S™

    BarriersDEMAT
    RU3(CO)12
    Ru15
    TaCl5
    TaF5
    TAIMATA
    TDMAT

    Electrochemical Deposition (ECD)Viaform® - Viaform Accelerator, Viaform Suppressor, Viaform Leveler, Analytical Standards
    NExT™ Generation Viaform - Viaform NExT Leveler, Viaform V700, Viaform S900

    Post CMP Cleans

    Cu post-CMP cleans - ESC-700T series products
    CMP buff - SP-28T
    CMP pad cleans - LP-12T, ESC-700 series products
    Post-post-CMP cleans - ESC-700 series products
    TaN post-CMP cleans - ESC-700 series products
    Dielectric Cleaning - ESC-700 series products
    STI post-CMP cleans - ESC-700 series products
    Pre-ECP cleans - ESC-700 series products
    W-CMP Cleans - ESC-794T, ESC-774T

    Dielectrics

    OMTS
    TEOS
    TMGe
    Wafer Reclaim

    RegenSi™